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UHV/CVD生长SiGe/Si异质结构材料 期刊论文
半导体学报, 2000, 卷号: 21, 期号: 3, 页码: 250
Authors:  成步文;  李代宗;  黄昌俊;  于卓;  张春晖;  王玉田;  余金中;  王启明
Adobe PDF(311Kb)  |  Favorite  |  View/Download:1149/309  |  Submit date:2010/11/23
Growth of SiGe Films by Cold-wall UHV/CVD Using GeH_4 and Si_2H_6 期刊论文
Semiconductor Photonics and Technology, 2000, 卷号: 6, 期号: 3, 页码: 134
Authors:  Cheng Buwen;  Li Daizong;  Huang Changjun;  Zhang Chunhui;  Yu Zhuo;  Wang Yutian;  Yu Jinzhong;  Yang Qinqing;  Wang Qiming
Adobe PDF(179Kb)  |  Favorite  |  View/Download:674/212  |  Submit date:2010/11/23