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1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 11, 页码: 1140-1144
Authors:  Zuo Yuhuai;  Huang Changjun;  Cheng Buwen;  Cai Xiao;  Mao Rongwei;  Li Chuanbo;  Luo Liping;  Gao Junhua;  Bai Yunxia;  Jiang Lei;  Ma Chaohua;  Zhu Jialian;  Wang Liangchen;  Yu Jinzhong;  Wang Qiming
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