SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm
Zuo Yuhuai; Huang Changjun; Cheng Buwen; Cai Xiao; Mao Rongwei; Li Chuanbo; Luo Liping; Gao Junhua; Bai Yunxia; Jiang Lei; Ma Chaohua; Zhu Jialian; Wang Liangchen; Yu Jinzhong; Wang Qiming
2003
Source Publication半导体学报
Volume24Issue:11Pages:1140-1144
AbstractOptical filters capable of single control parameter-based wide tuning are implemented and studied. A prototype surface micromachined 1.3μm Si-based MOEMS (micro-opto-electro-mechanical-systems) tunable filter exhibits a continuous and large tuning range of 90 nm at 50 V tuning voltage. The filter can be integrated with Si-based photodetector in a low-cost component for coarse wavelength division multiplexing systems operating in the 1.3μm band.
metadata_83institute of semiconductors, the chinese academy of sciences
Subject Area光电子学
Funding Organization国家重点基础研究发展规划(No. G2 366 3),国家自然科学基金(批准号
Indexed ByCSCD
Language英语
CSCD IDCSCD:1235899
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17773
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Zuo Yuhuai,Huang Changjun,Cheng Buwen,et al. 1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm[J]. 半导体学报,2003,24(11):1140-1144.
APA Zuo Yuhuai.,Huang Changjun.,Cheng Buwen.,Cai Xiao.,Mao Rongwei.,...&Wang Qiming.(2003).1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm.半导体学报,24(11),1140-1144.
MLA Zuo Yuhuai,et al."1.3μm Si-Based MOEMS Optical Tunable Filter with a Tuning Range of 90nm".半导体学报 24.11(2003):1140-1144.
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