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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [1]
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焦春美 [1]
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Patent [1]
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2008 [1]
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中文 [1]
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一种生长氧化锌薄膜的装置及方法
专利
专利类型: 发明, 申请日期: 2008-07-02, 公开日期: 2009-06-04, 2009-06-11
Inventors:
杨少延
;
刘祥林
;
赵凤瑷
;
焦春美
;
董向芸
;
张晓沛
;
范海波
;
魏宏源
;
张攀峰
;
王占国
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Submit date：2009/06/11
