Knowledge Management System Of Institute of Semiconductors,CAS
一种生长氧化锌薄膜的装置及方法 | |
杨少延; 刘祥林; 赵凤瑷; 焦春美![]() | |
2008-07-02 | |
Date Available | 2009-06-04 ; 2009-06-11 |
Subtype | 发明 |
Application Date | 2006-12-28 |
Language | 中文 |
Application Number | 200610169751 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/4099 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 杨少延,刘祥林,赵凤瑷,等. 一种生长氧化锌薄膜的装置及方法[P]. 2008-07-02. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
200610169751.pdf(1046KB) | 限制开放 | -- | Application Full Text |
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