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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [2]
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Patent [1]
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2003 [2]
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中文 [2]
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人工晶体学报 [1]
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磷化铟单晶片的抛光工艺
专利
专利类型: 发明, 申请日期: 2003-03-12, 公开日期: 2009-06-04, 2009-06-11
Inventors:
董宏伟
;
赵有文
;
杨子祥
;
焦景华
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Submit date：2009/06/11
无权访问的条目
期刊论文
Authors:
赵有文
;
段满龙
;
孙文荣
;
杨子祥
;
焦景华
;
赵建群
;
曹慧梅
;
吕旭如
Adobe PDF(496Kb)
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View/Download：955/195
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Submit date：2010/11/23
