Characteristics of SOI rib waveguide microring and racetrack resonators

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Characteristics of SOI rib waveguide microring and racetrack resonators
	Huang, QZ; Xiao, X; Li, YT; Yu, YD; Yu, JZ; Yu, JZ, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
	2008
会议名称	5th IEEE International Conference on Group IV Photonics
会议录名称	2008 5TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS
页码	: 143-145
会议日期	SEP 17-19, 2008
会议地点	Sorrento, ITALY
出版地	345 E 47TH ST, NEW YORK, NY 10017 USA
出版者	IEEE
ISBN	978-1-4244-1769-8
部门归属	[huang, qingzhong; xiao, xi; li, yuntao; yu, yude; yu, jinzhong] chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	Characteristics of microring/racetrack resonators, in submicron SOI rib waveguides, have been investigated. The effects of waveguide dimensions, coupler design, roughness, and oxide cladding are considered. Moreover, guided mode, loss and dispersion of such waveguides are analyzed.
关键词	Resonators Submicron Rib Waveguides Silicon-on-insulator Electron Beam Lithography
学科领域	光电子学
主办者	IEEE.; Informat Soc Technol.; Helios.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/8344
专题	中国科学院半导体研究所（2009年前）
通讯作者	Yu, JZ, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Huang, QZ,Xiao, X,Li, YT,et al. Characteristics of SOI rib waveguide microring and racetrack resonators[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2008:: 143-145.

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