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D-UHV/CVD 外延生长SiGe和ArF准分子激光退火制备量子点的研究
曾玉刚
Subtype博士
Thesis Advisor余金中
2008
Degree Grantor中国科学院半导体研究所
Place of Conferral北京
Subject Area微电子学与固体电子学
Language中文
Date Available2009-04-13 ; 2009-07-09
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/5991
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 曾玉刚. D-UHV/CVD 外延生长SiGe和ArF准分子激光退火制备量子点的研究[D]. 北京. 中国科学院半导体研究所,2008.
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