Knowledge Management System Of Institute of Semiconductors,CAS
在硅衬底上磁控溅射制备铁磁性锰硅薄膜的方法 | |
刘力锋; 陈诺夫; 尹志岗![]() | |
2006-12-27 | |
Date Available | 2009-06-04 ; 2009-06-11 |
Subtype | 发明 |
Application Date | 2005-06-24 |
Language | 中文 |
Application Number | 200510079720 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/3653 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 刘力锋,陈诺夫,尹志岗,等. 在硅衬底上磁控溅射制备铁磁性锰硅薄膜的方法[P]. 2006-12-27. |
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File Name/Size | DocType | Version | Access | License | ||
200510079720.pdf(291KB) | 限制开放 | -- | Application Full Text |
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