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4H-SiC结型势垒肖特基(JBS)二极管的设计与研制及其关键工艺研究
王进泽
Subtype硕士
Thesis Advisor杨富华+王晓东+何志
2015-05-28
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline电子与通信工程
Subject Area半导体器件
Date Available2015-06-02
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/26574
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
王进泽. 4H-SiC结型势垒肖特基(JBS)二极管的设计与研制及其关键工艺研究[D]. 北京. 中国科学院研究生院,2015.
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