Integrated multimode interference couplers in silicon-on insulator

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Integrated multimode interference couplers in silicon-on insulator
	Wei HZ; Yu YZ; Zhang XF; Liu ZL; Ma HZ; Li GH; Shi W; Fang CS; Wei HZ Chinese Acad Sci Inst Semicond State Key Lab INtegrated Optoelect Beijing 100083 Peoples R China.
	2000
会议名称	Conference on Optical Interconnects for Telecommunication and Data Communications
会议录名称	OPTICAL INTERCONNECTS FOR TELECOMMUNICATION AND DATA COMMUNICATIONS, 4225
页码	124-127
会议日期	NOV 08-10, 2000
会议地点	BEIJING, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-3896-0
部门归属	chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要	Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0m) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8dB. The devices show uniform power distribution.
关键词	Soi Multimode Interference Optical Waveguide Device Integrated Optics Power Splitters
学科领域	半导体器件
主办者	China Opt & Optoelectr Manufacturers Assoc.; Chinese Phys Soc.; SPIE.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/13727
专题	中国科学院半导体研究所（2009年前）
通讯作者	Wei HZ Chinese Acad Sci Inst Semicond State Key Lab INtegrated Optoelect Beijing 100083 Peoples R China.
推荐引用方式 GB/T 7714	Wei HZ,Yu YZ,Zhang XF,et al. Integrated multimode interference couplers in silicon-on insulator[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2000:124-127.

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