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Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H2O etching 期刊论文
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2010, 卷号: 20, 期号: 10, 页码: Art. No. 105029
Authors:  Zhang XY (Zhang Xinyu);  Li H (Li Hui);  Liu K (Liu Kan);  Luo J (Luo Jun);  Xie CS (Xie Changsheng);  Ji A (Ji An);  Zhang TX (Zhang Tianxu);  Zhang, XY, Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Hubei Province, Peoples R China. 电子邮箱地址: x_yzhang@yahoo.com.cn
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Optical-elements  Design  Silicon  Arrays  Lenses