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Effect of co-implantation of nitrogen and fluorine on the fixed positive charge density of the buried oxide layer in SIMOX SOI materials 期刊论文
Acta Physica Sinica, 2013, 卷号: 62, 期号: 11, 页码: 117303
Authors:  Zhang Bai-Qiang, Zheng Zhong-Shan, Yu Fang, Ning Jin, Tang Hai-Ma, Yang Zhi-An
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