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Fabrication of GaN-based ridge waveguides with very smooth and vertical sidewalls by combined plasma dry etching and wet chemical etching 期刊论文
Physica Status Solidi A, 2015, 卷号: 212, 期号: 10, 页码: 2341–2344
Authors:  Wanyong Li;  Yi Luo;  Bing Xiong;  Changzheng Sun;  Lai Wang;  Jian Wang;  Yanjun Han;  Jianchang Yan;  Tongbo Wei;  Hongxi Lu
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