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Effect of Nitridation on Morphology, Structural Properties and Stress of AIN Films 期刊论文
CHINESE PHYSICS LETTERS, 2008, 卷号: 25, 期号: 12, 页码: 4364-4367
Authors:  Hu WG;  Jiao CM;  Wei HY;  Zhang PF;  Kang TT;  Zhang RQ;  Liu XL;  Hu WG Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci POB 912 Beijing 100083 Peoples R China. E-mail Address:
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Transmission Electron-microscopy  Wurtzite-type Crystals  Vapor-phase Epitaxy  Intrinsic Stress  Sapphire Surface  Thin-films  Gan  Growth  Diffraction  Mechanism