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高质量二维光子晶体结构刻蚀掩膜版的制作方法 期刊论文
半导体学报, 2006, 卷号: 27, 期号: 9, 页码: 1640-1644
Authors:  杜伟;  许兴胜;  韩伟华;  王春霞;  张杨;  杨富华;  陈弘达
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