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中国科学院半导体研究所机构知识库
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Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via
期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors:
Meng Zhang
;
Jian Yang
;
Yurong He
;
Fan Yang
;
Fuhua Yang
;
Guowei Han
;
Chaowei Si
;
Jin Ning
Adobe PDF(3329Kb)
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View/Download:32/0
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Submit date:2020/08/05
A NovelMultiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes
期刊论文
IEEE Transactions on Electron Devices, 2019, 卷号: 66, 期号: 8, 页码: 3683-3685
Authors:
Xiao Kan
;
Zeji Chen
;
Quan Yuan
;
Fengxiang Wang
;
Jinling Yang
;
Fuhua Yang
Adobe PDF(1583Kb)
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View/Download:24/0
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Submit date:2020/08/05
Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia
期刊论文
Sensors, 2019, 卷号: 19, 页码: 3326
Authors:
Xiaochen Liu
;
Lihao Wang
;
Junyuan Zhao
;
Yinfang Zhu
;
Jinling Yang
;
Fuhua Yang
Adobe PDF(3477Kb)
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View/Download:31/0
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Submit date:2020/07/31
A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing
期刊论文
Journal of Micromechanics & Microengineering, 2018, 卷号: 28, 期号: 11, 页码: 115003
Authors:
Xiaochen Liu
;
Lihao Wang
;
Yinfang Zhu
;
Junyuan Zhao
;
Jinying Zhang
;
Jinling Yang
;
Fuhua Yang
Adobe PDF(1954Kb)
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View/Download:130/0
  |  
Submit date:2019/11/12
Boron nitride nanopores: Highly sensitive DNA single-molecule detectors
期刊论文
Advanced Materials, 2013, 卷号: 25, 期号: 33, 页码: 4549-4554
Authors:
Liu, Song
;
Lu, Bo
;
Zhao, Qing
;
Yu, Dapeng
;
Li, Ji
;
Gao, Teng
;
Chen, Yubin
;
Zhang, Yanfeng
;
Liu, Zhongfan
;
Fan, Zhongchao
;
Yang, Fuhua
;
You, Liping
Adobe PDF(3117Kb)
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View/Download:406/100
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Submit date:2014/04/30
Low-Temperature Performance of Accumulation-Mode p-Channel Wrap-Gated FinFETs
期刊论文
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2013, 卷号: 13, 期号: 2, 页码: 804-807
Authors:
Zhang, Yanbo
;
Du, Yandong
;
Chen, Yankun
;
Li, Xiaoming
;
Yang, Xiang
;
Han, Weihua
;
Yang, Fuhua
Adobe PDF(3099Kb)
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View/Download:808/197
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Submit date:2013/10/08
Fabrication and characterization of an SOI MEMS gyroscope
期刊论文
Journal of Semiconductors, 2013, 卷号: 34, 期号: 6, 页码: 064004
Authors:
Zhong Weiwei
;
Han Guowei
;
Si Chaowei
;
Ning Jin
;
Yang Fuhua
Adobe PDF(1921Kb)
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View/Download:849/120
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Submit date:2014/05/16
Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram
期刊论文
Advanced Materials Research, 2013, 卷号: 677, 页码: 74-78
Authors:
Han, Guowei
;
Si, Chaowei
;
Ning, Jing
;
Zhao, Yongmei
;
Sun, Guosheng
;
Yang, Fuhua
Adobe PDF(560Kb)
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View/Download:603/139
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Submit date:2014/05/08
Temperature dependence of electronic behaviors in n-type multiplechannel
期刊论文
Journal of Applied Physics, 2013, 卷号: 114, 期号: 12, 页码: 124507
Authors:
Ma, Liuhong
;
Han, Weihua
;
Wang, Hao
;
Li, Xiaoming
;
Yang, Fuhua
Adobe PDF(961Kb)
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View/Download:536/122
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Submit date:2014/04/09
Low-temperature electron mobility in heavily n-doped junctionless nanowire transistor
期刊论文
Applied Physics Letters, 2013, 卷号: 102, 期号: 22, 页码: 223507
Authors:
Li, Xiaoming
;
Han, Weihua
;
Wang, Hao
;
Ma, Liuhong
;
Zhang, Yanbo
;
Du, Yandong
;
Yang, Fuhua
Adobe PDF(828Kb)
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View/Download:844/279
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Submit date:2014/05/08