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Realization of SOI submicrometer optical waveguide components - art. no. 68380L 会议论文
OPTOELECTRONIC DEVICES AND INTEGRATION II, Beijing, PEOPLES R CHINA, NOV 12-15, 2007
作者:  Xu XJ;  Chen SW;  Yu JZ;  Tu XG;  Xu, XJ, Chinese Acad Sci, Inst Semicond, State Key Lab Optoelect, POB 912, Beijing 100083, Peoples R China.
Adobe PDF(692Kb)  |  收藏  |  浏览/下载：1550/307  |  提交时间：2010/03/09
Silicon-on-insulator  
Fabrication method of silicon nanostructures by anisotropic etching 会议论文
2008 5TH IEEE INTERNATIONAL CONFERENCE ON GROUP IV PHOTONICS, Sorrento, ITALY, SEP 17-19, 2008
作者:  Han, WH;  Yang, X;  Wang, Y;  Yang, FH;  Yu, JZ;  Han, WH, Chinese Acad Sci, Inst Semicond, POB 912, Beijing 100083, Peoples R China.
Adobe PDF(1308Kb)  |  收藏  |  浏览/下载：1263/368  |  提交时间：2010/03/09