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中国科学院半导体研究所机构知识库
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光电子研究发展中心 [2]
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一种超声波触觉反馈系统及其制造方法
专利
专利类型: 发明, 公开日期: 2016-09-22
Inventors:
王小青
;
宁瑾
;
徐团伟
;
俞育德
;
魏清泉
;
刘文文
;
蒋莉娟
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View/Download：1015/5
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Submit date：2016/09/22
一种驻极体电容式超声传感器及其制作方法
专利
专利类型: 发明, 公开日期: 2016-09-29
Inventors:
王小青
;
宁瑾
;
徐团伟
;
俞育德
;
魏清泉
;
刘文文
;
蒋莉娟
Adobe PDF(535Kb)
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View/Download：943/4
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Submit date：2016/09/29
