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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [1]
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尹志岗 [1]
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Patent [1]
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2006 [1]
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中文 [1]
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Date Issued：2006
Author：尹志岗
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在硅衬底上磁控溅射制备铁磁性锰硅薄膜的方法
专利
专利类型: 发明, 申请日期: 2006-12-27, 公开日期: 2009-06-04, 2009-06-11
Inventors:
刘力锋
;
陈诺夫
;
尹志岗
;
杨霏
;
柴春林
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Submit date：2009/06/11
