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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中国科学院半导体研究... [1]
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杨少延 [1]
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Journal ar... [1]
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2004 [1]
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中文 [1]
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真空科学与技术学报 [1]
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国家973资助项目,... [1]
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Date Issued：2004
Source Publication：真空科学与技术学报
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无权访问的条目
期刊论文
Authors:
刘志凯
;
周剑平
;
柴春林
;
杨少延
;
宋书林
;
李艳丽
;
陈诺夫
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Submit date：2010/11/23
