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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中科院半导体材料科学... [1]
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2018 [1]
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Materials ... [1]
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Source Publication：Materials Science in Semiconductor Processing
Indexed By：SCI
Date Issued：2018
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期刊论文
Authors:
Guiying Shen
;
Youwen Zhao
;
Yongbiao Bai
;
Ding Yu
;
Jingming Liu
;
Hui Xie
;
Zhiyuan Dong
;
Jun Yang
;
Fengyun Yang
;
Fenghua Wang
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Submit date：2019/11/15
