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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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半导体集成技术工程研... [2]
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2023 [2]
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中文 [2]
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Date Issued：2023
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ZnO基MEMS NO2 气体传感器的制备及性能优化研究
学位论文
工学硕士, 中国科学院半导体研究所: 中国科学院大学, 2023
Authors:
卢晓锐
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Submit date：2023/07/03
血压监测 MEMS 压力传感器制备及可植入封装
学位论文
工程硕士, 中国科学院半导体研究所: 中国科学院大学, 2023
Authors:
尤志伟
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Submit date：2023/07/03
