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无权访问的条目 期刊论文
作者:  Gong, Y;  Kutayiah, AR;  Zhang, XH;  Zhao, JH;  Ren, YH
Adobe PDF(769Kb)  |  收藏  |  浏览/下载:781/259  |  提交时间:2013/02/07
无权访问的条目 期刊论文
作者:  Cui CX;  Chen YH;  Jin P;  Xu B;  Ren YY;  Zhao C;  Wang ZG;  Chen, YH, Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. E-mail: yhchen@red.semi.ac.cn
Adobe PDF(323Kb)  |  收藏  |  浏览/下载:948/261  |  提交时间:2010/04/11
无权访问的条目 期刊论文
作者:  Jiao YH (Jiao Y. H.);  Wu J (Wu J.);  Xu B (Xu B.);  Jin P (Jin P.);  Hu LJ (Hu L. J.);  Liang LY (Liang L. Y.);  Ren YY (Ren Y. Y.);  Wang ZG (Wang Z. G.);  Jiao, YH, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China.
Adobe PDF(629Kb)  |  收藏  |  浏览/下载:1130/314  |  提交时间:2010/04/11
无权访问的条目 期刊论文
作者:  Cui CX;  Chen YH;  Ren YY;  Xu B;  Jin P;  Zhao C;  Wang ZG;  Cui, CX, Chinese Acad Sci, Inst Semicond, Lab Semicond Mat Sci, POB 912, Beijing 100083, Peoples R China. E-mail: cxcui@red.semi.ac.cn
Adobe PDF(1702Kb)  |  收藏  |  浏览/下载:999/230  |  提交时间:2010/04/11
Effects and numerical analysis of argon gas flow on the oxygen concentration in Czochralski silicon single crystal growth 会议论文
MICROELECTRONIC ENGINEERING, 66 (1-4), XIAN, PEOPLES R CHINA, JUN 10-14, 2002
作者:  Zhang ZC;  Ren BY;  Chen YH;  Yang SY;  Wang ZG;  Zhang ZC Chinese Acad Sci Inst Semicond Lab Semicond Mat Sci Beijing 100083 Peoples R China.
Adobe PDF(389Kb)  |  收藏  |  浏览/下载:1497/254  |  提交时间:2010/11/15
Czochralski Method  Growth From Melt  Semiconductor Silicon  Argon Gas Flow  Computer Simulation  Oxygen Content  Furnace Pressure  
无权访问的条目 期刊论文
作者:  Zhang ZC;  Ren BY;  Chen YH;  Yang SY;  Wang ZG;  Zhang ZC,Chinese Acad Sci,Inst Semicond,Lab Semicond Mat Sci,Beijing 100083,Peoples R China.
Adobe PDF(389Kb)  |  收藏  |  浏览/下载:830/203  |  提交时间:2010/08/12