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Fracture properties of PECVD silicon nitride thin films by long rectangular memrane bulge test 会议论文
2008 3RD IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS, Sanya, PEOPLES R CHINA, JAN 06-09, 2008
作者:  Zhou, W;  Yang, JL;  Li, Y;  Yang, FH;  Yang, JL, Chinese Acad Sci, Inst Semicond, Beijing 100864, Peoples R China.
Adobe PDF(267Kb)  |  收藏  |  浏览/下载：1458/372  |  提交时间：2010/03/09
Bulge Test  Fracture Property  Silicon Nitride  Weibull Distribution Function  
Accurate vibration detection of a rough surface - art. no. 683118 会议论文
NANOPHOTONICS,NANOSTRUCTURE,AND NANOMETROLOGY II, Beijing, PEOPLES R CHINA, NOV 12-14, 2007
作者:  Zeng, HL;  Zhou, Y;  Fan, ST;  He, J;  Zeng, HL, Chinese Acad Sci, Inst Semicond, Beijing 100864, Peoples R China.
Adobe PDF(218Kb)  |  收藏  |  浏览/下载：1627/372  |  提交时间：2010/03/09
Measurement Of Microvibration  Nanometrology  Interferometry  Vibration Detection