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AIXTRON AG.; Epichem 1 China Opt & Optoelec 1 Chinese Inst Elect.; 1
IEEE Beijing Sect.; 1 IEEE. 1 IHP Frankfurt.; IHP 1
National Basic Resea 1 National Natural Sci 1 SPIE.; China Opt & O 1
SPIE.; Chinese Opt S 1 SPIE.; Chinese Opt S 1 State Key Developmen 1
Supported by the Sta 1 This work was suppor 1 program for New Cent 1