Corrugated surfaces formed on GaAs (331)a substrates: The template for laterally ordered InGaAs nanowires

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	Corrugated surfaces formed on GaAs (331)a substrates: The template for laterally ordered InGaAs nanowires
	Miao, ZH (Miao, Zhenhua); Gong, Z (Gong, Zheng); Fang, ZD (Fang, Zhidan); Niu, ZC (Niu, Zhichuan); Gong, Z, Chinese Acad Sci, Inst Semicond, Natl Lab Superlattice & Microstruct, PO Box 912, Beijing 100083, Peoples R China.
	2006
会议名称	2nd Asian Conference on Nanoscience and Nanotechnology
会议录名称	International Journal of Nanoscience丛书标题: International Journal of Nanoscience Series
页码	Vol 5 No 6 5 (6): 757-762
会议日期	NOV 24-27, 2004
会议地点	Beijing, PEOPLES R CHINA
出版地	PO BOX 128 FARRER RD, SINGAPORE 9128, SINGAPORE
出版者	WORLD SCIENTIFIC PUBL CO PTE LTD
部门归属	chinese acad sci, inst semicond, natl lab superlattice & microstruct, beijing 100083, peoples r china
摘要	Morphology evolution of high-index (331)A surfaces during molecular beam epitaxy (MBE) growth have been investigated in order to uncover their unique physic properties and fabricate spatially ordered low dimensional nanostructures. Atomic Force Microscope (AFM) measurements have shown that the step height and terrace width of GaAs layers increase monotonically with increasing substrate temperature in conventional MBE. However, this situation is reversed in atomic hydrogen-assisted MBE, indicating that step bunching is partly suppressed. We attribute this to the reduced surface migration length of Ga adatoms with atomic hydrogen. By using the step arrays formed on GaAs (331)A surfaces as the templates, we fabricated laterally ordered InGaAs self-aligned nanowires.
关键词	Atomic Hydrogen Molecular Beam Epitaxy Step Arrays Molecular-beam Epitaxy Atomic-hydrogen Vicinal Surface Quantum Dots Growth Temperature Irradiation Mechanism Mbe
学科领域	半导体物理
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/9816
专题	中国科学院半导体研究所（2009年前）
通讯作者	Gong, Z, Chinese Acad Sci, Inst Semicond, Natl Lab Superlattice & Microstruct, PO Box 912, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Miao, ZH ,Gong, Z ,Fang, ZD ,et al. Corrugated surfaces formed on GaAs (331)a substrates: The template for laterally ordered InGaAs nanowires[C]. PO BOX 128 FARRER RD, SINGAPORE 9128, SINGAPORE:WORLD SCIENTIFIC PUBL CO PTE LTD,2006:Vol 5 No 6 5 (6): 757-762.

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