Realization of SOI submicrometer optical waveguide components - art. no. 68380L

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	Realization of SOI submicrometer optical waveguide components - art. no. 68380L
	Xu XJ; Chen SW; Yu JZ; Tu XG; Xu, XJ, Chinese Acad Sci, Inst Semicond, State Key Lab Optoelect, POB 912, Beijing 100083, Peoples R China.
	2008
会议名称	2nd Conference on Optoelectronic Devices and Integration
会议录名称	OPTOELECTRONIC DEVICES AND INTEGRATION II
页码	6838: L8380-L8380
会议日期	NOV 12-15, 2007
会议地点	Beijing, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	978-0-8194-7013-3
部门归属	[xu, xuejun; chen, shaowu; yu, jinzhong; tu, xiaoguang] chinese acad sci, inst semicond, state key lab optoelect, beijing 100083, peoples r china
摘要	Submicrometer channel and rib waveguides based on SOI (Silicon-On-Insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. Propagation loss of 8.39dB/mm was measured using the cut-back method. Based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, T-branches, directional couplers and multimode interferometer couplers.
关键词	Silicon-on-insulator
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/7798
专题	中国科学院半导体研究所（2009年前）
通讯作者	Xu, XJ, Chinese Acad Sci, Inst Semicond, State Key Lab Optoelect, POB 912, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Xu XJ,Chen SW,Yu JZ,et al. Realization of SOI submicrometer optical waveguide components - art. no. 68380L[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2008:6838: L8380-L8380.

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