Knowledge Management System Of Institute of Semiconductors,CAS
利用阳极氧化浴槽制备有序的阳极氧化铝通孔模板的方法 | |
周慧英; 曲胜春; 徐波; 张春林; 王占国 | |
2007-09-17 | |
Date Available | 2009-06-04 ; 2009-06-11 |
Subtype | 发明 |
Application Date | 2006-03-17 |
Language | 中文 |
Application Number | CN200610057490.4 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/4137 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 周慧英,曲胜春,徐波,等. 利用阳极氧化浴槽制备有序的阳极氧化铝通孔模板的方法[P]. 2007-09-17. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
CN200610057490.4.pdf(557KB) | 限制开放 | -- | Application Full Text |
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