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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
检测键合质量的红外透视成像装置及调节方法
何国荣; 郑婉华; 杨国华; 石岩; 渠红伟; 宋国锋; 陈良惠
2008-05-14
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-11-09
Language中文
Application Number200610114407
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/4021
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 何国荣,郑婉华,杨国华,等. 检测键合质量的红外透视成像装置及调节方法[P]. 2008-05-14.
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200610114407.pdf（602KB） 限制开放--Application Full Text
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