Knowledge Management System Of Institute of Semiconductors,CAS
| 用固态磷裂解源炉分子束外延磷化铟材料的方法 | |
李路 ; 刘峰奇; 周华兵; 梁凌燕; 吕小晶
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| 2007-06-13 | |
| Date Available | 2009-06-04 ; 2009-06-11 |
| Subtype | 发明 |
| Application Date | 2005-11-30 |
| Language | 中文 |
| Application Number | 200510126237 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/3739 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | 李路,刘峰奇,周华兵,等. 用固态磷裂解源炉分子束外延磷化铟材料的方法[P]. 2007-06-13. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 200510126237.pdf（593KB） | 限制开放 | -- | Application Full Text | |||
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