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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
磁控溅射仪衬底固定夹具
王鹏; 陈诺夫; 尹志岗; 杨霏
2007-05-02
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2005-10-27
Language中文
Application Number200510086729
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3683
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 王鹏,陈诺夫,尹志岗,等. 磁控溅射仪衬底固定夹具[P]. 2007-05-02.
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200510086729.pdf（452KB） 限制开放--Application Full Text
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