Knowledge Management System Of Institute of Semiconductors,CAS
| 用磁控溅射法在镓砷衬底上外延生长铟砷锑薄膜的方法 | |
| 彭长涛; 陈诺夫; 吴金良; 尹志冈; 杨霏 | |
| 2006-11-22 | |
| Date Available | 2009-06-04 ; 2009-06-11 |
| Subtype | 发明 |
| Application Date | 2005-05-19 |
| Language | 中文 |
| Application Number | 200510011741 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/3533 |
| Collection | 中国科学院半导体研究所（2009年前） |
| Recommended Citation GB/T 7714 | 彭长涛,陈诺夫,吴金良,等. 用磁控溅射法在镓砷衬底上外延生长铟砷锑薄膜的方法[P]. 2006-11-22. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 200510011741.pdf（349KB） | 限制开放 | -- | Application Full Text | |||
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