Knowledge Management System Of Institute of Semiconductors,CAS
一种制备三元高K栅介质材料的方法 | |
李艳丽; 陈诺夫; 刘立峰; 尹志刚; 杨菲; 柴春林 | |
2006-05-31 | |
Date Available | 2009-06-04 ; 2009-06-11 |
Subtype | 发明 |
Application Date | 2004-11-25 |
Language | 中文 |
Application Number | 200410009860 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/3491 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 李艳丽,陈诺夫,刘立峰,等. 一种制备三元高K栅介质材料的方法[P]. 2006-05-31. |
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File Name/Size | DocType | Version | Access | License | ||
200410009860.pdf(375KB) | 限制开放 | -- | Application Full Text |
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