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一种制备三元高K栅介质材料的方法
李艳丽; 陈诺夫; 刘立峰; 尹志刚; 杨菲; 柴春林
2006-05-31
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2004-11-25
Language中文
Application Number200410009860
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3491
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 李艳丽,陈诺夫,刘立峰,等. 一种制备三元高K栅介质材料的方法[P]. 2006-05-31.
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200410009860.pdf（375KB） 限制开放--Application Full Text
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