SEMI OpenIR  > 中科院半导体材料科学重点实验室
感应加热式MOCVD设备的模拟仿真与研制
梅书哲
Subtype博士
Thesis Advisor王晓亮
2018-06-02
Degree Grantor中国科学院大学
Place of Conferral北京
Degree Discipline微电子学与固体电子学
KeywordMocvd 感应加热 温度均匀性 流场温场 建模仿真
Subject Area半导体材料 ; 半导体器件
Date Available2018-06-11
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/28543
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
梅书哲. 感应加热式MOCVD设备的模拟仿真与研制[D]. 北京. 中国科学院大学,2018.
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2018.6-毕业论文.pdf(20542KB) 限制开放LicenseApplication Full Text
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