Knowledge Management System Of Institute of Semiconductors,CAS
一种芯片外观缺陷检测系统 | |
李搏; 吴南健; 刘剑; 杨永兴; 杨杰 | |
Rights Holder | 中国科学院半导体所 |
Date Available | 2016-08-30 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体物理 |
Application Date | 2014-12-25 |
Application Number | CN201410827792.X |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/27241 |
Collection | 半导体超晶格国家重点实验室 |
Recommended Citation GB/T 7714 | 李搏,吴南健,刘剑,等. 一种芯片外观缺陷检测系统. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
一种芯片外观缺陷检测系统.pdf(203KB) | 限制开放 | License | Application Full Text |
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