SEMI OpenIR  > 半导体超晶格国家重点实验室
一种芯片外观缺陷检测系统
李搏; 吴南健; 刘剑; 杨永兴; 杨杰
Rights Holder中国科学院半导体所
Date Available2016-08-30
Country中国
Subtype发明
Subject Area半导体物理
Application Date2014-12-25
Application NumberCN201410827792.X
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27241
Collection半导体超晶格国家重点实验室
Recommended Citation
GB/T 7714
李搏,吴南健,刘剑,等. 一种芯片外观缺陷检测系统.
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