SEMI OpenIR  > 纳米光电子实验室
InP基雪崩光电二极管结构设计与关键工艺研究
李慧梅
Subtype硕士
Thesis Advisor陈良惠 ; 宋国峰
2016-05-30
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
KeywordIngaas/inp Apd Ingaas/inalas Apd 增益 暗电流 击穿电压 扩散zn掺杂
Subject Area半导体器件
Date Available2016-06-02
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/27157
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
李慧梅. InP基雪崩光电二极管结构设计与关键工艺研究[D]. 北京. 中国科学院研究生院,2016.
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