| 一种挡光式微机电可变光衰减器 | |
| 毛旭; 吕兴东; 魏伟伟; 杨晋玲; 杨富华 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-02-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 微电子学 |
| Application Date | 2013-10-25 |
| Application Number | CN201310510617.3 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25494 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | 毛旭,吕兴东,魏伟伟,等. 一种挡光式微机电可变光衰减器. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 一种挡光式微机电可变光衰减器.pdf（876KB） | 限制开放 | License | Application Full Text | |||
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