阵列型微机电可变光衰减器 | |
毛旭; 吕兴东; 魏伟伟; 杨晋玲; 杨富华 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2014-02-12 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 微电子学 |
Application Date | 2013-11-12 |
Application Number | CN201310561866.5 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25484 |
Collection | 半导体集成技术工程研究中心 |
Recommended Citation GB/T 7714 | 毛旭,吕兴东,魏伟伟,等. 阵列型微机电可变光衰减器. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
阵列型微机电可变光衰减器.pdf(1633KB) | 限制开放 | License | Application Full Text |
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