| 激光光束匀化装置 | |
| 曾华林; 何军; 李丽艳; 范松涛; 佟有万; 周燕 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2012-12-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 光电子学 |
| Application Date | 2012-08-27 |
| Application Number | CN201210308852.8 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25277 |
| Collection | 光电系统实验室 |
| Recommended Citation GB/T 7714 | 曾华林,何军,李丽艳,等. 激光光束匀化装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 激光光束匀化装置(1).pdf（171KB） | 限制开放 | License | Application Full Text | |||
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