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补偿式微位移传感光子集成芯片
祝宁华; 刘建国; 刘宇; 谢亮; 陈伟; 鞠昱; 孙可
Rights Holder中国科学院半导体研究所
Date Available2011-08-30
Country中国
Subtype发明
Abstract本发明公开了一种补偿式微位移传感光子集成芯片,该芯片由一个面发射激光器和至少二个谐振腔增强型光电探测器构成,其中,所述面发射激光器发出的激光照射到目标探测物表面,经目标探测物散射或反射后,被所述至少二个谐振腔增强型光电探测器接收,通过测量所述至少二个谐振腔增强型光电探测器探测到的光强变化来实现微位移传感。利用本发明,解决了垂直腔面发射激光器和两个谐振腔增强型光电探测器的单片集成问题,实现了补偿式反射测微。
metadata_83集成光电子学国家重点实验室
Patent NumberCN200910241695.1
Language中文
Status公开
Application NumberCN200910241695.1
Patent Agent周国城
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/21995
Collection集成光电子学国家重点实验室
Recommended Citation
GB/T 7714
祝宁华,刘建国,刘宇,等. 补偿式微位移传感光子集成芯片. CN200910241695.1.
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