SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
The effect of Fabry-Perot interference on the packaging of SOI-based optoelectronic devices
Xin HL; Chen P; Li F; Wang CX; Cao P; Liu YL; Xin, HL, Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Optoelect, Beijing 100083, Peoples R China.
2004
Conference Name7th International Conference on Solid-State and Integrated Circuits Technology
Source Publication2004 7TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUITS TECHNOLOGY
PagesVOLS 1- 3 PROCEEDINGS: 2021-2024
Conference DateOCT 18-21, 2004
Conference PlaceBeijing, PEOPLES R CHINA
Publication Place345 E 47TH ST, NEW YORK, NY 10017 USA
PublisherIEEE
ISBN0-7803-8511-X
metadata_83chinese acad sci, inst semicond, res & dev ctr optoelect, beijing 100083, peoples r china
AbstractDuring the packaging of optoelectrome device, a problem always met is the instability of output power. The main effect causing this problem, Fabry-Perot interference, is discussed in this paper. Both theoretical analysis and experimental test are carried out and in good agreement. As an example of avoiding the disadvantage of Fabry-Perot interference, the packaging process of Silicon-on-Insulator (SOI) based Variable Optical Attenuator(VOA) is shown at last.
Subject Area光电子学
Funding OrganizationChinese Inst Elect.; IEEE Beijing Sect.; IEEE Elect Devices Soc.; IEEE EDS Beijing Chapter.; IEEE Solid-State Circuits Soc.; IEEE SSCS Beijing Chapter.; Japan Soc Appl Phys.; IEE Elect Div.; URSI Commiss D.; Inst Elect Engineers Korea.; Natl Nat Sci Fdn China.; Beijing Municipal Bureau Ind Dev.; Peking Univ.
Indexed By其他
Language英语
Document Type会议论文
Identifierhttp://ir.semi.ac.cn/handle/172111/10104
Collection中国科学院半导体研究所(2009年前)
Corresponding AuthorXin, HL, Chinese Acad Sci, Inst Semicond, Res & Dev Ctr Optoelect, Beijing 100083, Peoples R China.
Recommended Citation
GB/T 7714
Xin HL,Chen P,Li F,et al. The effect of Fabry-Perot interference on the packaging of SOI-based optoelectronic devices[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2004:VOLS 1- 3 PROCEEDINGS: 2021-2024.
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