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中国科学院半导体研究所机构知识库
Knowledge Management System Of Institute of Semiconductors,CAS
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中科院半导体材料科学... [2]
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二维GaAs基光子晶体微腔的制作与光谱特性分析
期刊论文
物理学报, 2010, 卷号: 59, 期号: 10, 页码: 7073-7077
Authors:
彭银生
;
叶小玲
;
徐波
;
牛洁斌
;
贾锐
;
王占国
;
梁松
;
杨晓红
Adobe PDF(889Kb)
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View/Download:1002/193
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Submit date:2011/08/16
Optimization of inductively coupled plasma etching for low nanometer scale air-hole arrays in two-dimensional GaAs-based photonic crystals
期刊论文
Journal of Semiconductors, 2010, 卷号: 31, 期号: 1, 页码: 012003-1-012003-5
Authors:
Peng Yinsheng
;
Ye Xiaoling
;
Xu Bo
;
Jin Peng
;
Niu Jiebin
;
Jia Rui
;
Wang Zhanguo
Adobe PDF(351Kb)
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View/Download:1258/311
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Submit date:2011/08/16