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Nanodiamond formation by hot-filament chemical vapor deposition on carbon ions bombarded Si 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2002, 卷号: 236, 期号: 1-3, 页码: 85-89
Authors:  Liao MY;  Meng XM;  Zhou XT;  Hu JQ;  Wang ZG;  Liao MY,Chinese Acad Sci,Inst Semicond,Lab Semicond Mat Science,Beijing 100083,Peoples R China.
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Nucleation  Chemical Vapor Deposition Processes  Diamond  Nanomaterials  Diamond Thin-films  Amorphous-carbon  Plasmas  System  Field