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作者:  Wang XY (Wang Xiaoyan);  Wang XL (Wang Xiaoliang);  Wang BZ (Wang Baozhu);  Xiao HL (Xiao Hongling);  Wang JX (Wang Junxi);  Zeng YP (Zeng Yiping);  Li AN (Li Antnin);  Wang, XY, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China.
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