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A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing 期刊论文
Journal of Micromechanics & Microengineering, 2018, 卷号: 28, 期号: 11, 页码: 115003
Authors:  Xiaochen Liu;  Lihao Wang;  Yinfang Zhu;  Junyuan Zhao;  Jinying Zhang;  Jinling Yang;  Fuhua Yang
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