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3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity 期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2019, 卷号: 286, 页码: 123-132
Authors:  Zeji Chen ;   Fengxiang Wang ;   Quan Yuan ;   Xiao Kan ;   Jinling Yang ;   Jicong Zhao ;   Fuhua Yang
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Enhanced Binding Efficiency of Microcantilever Biosensor for the Detection of Yersinia 期刊论文
Sensors, 2019, 卷号: 19, 页码: 3326
Authors:  Xiaochen Liu;   Lihao Wang ;   Junyuan Zhao ;   Yinfang Zhu ;   Jinling Yang ;   Fuhua Yang
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A NovelMultiple-Frequency RF-MEMS Resonator Based on the Whispering Gallery Modes 期刊论文
IEEE Transactions on Electron Devices, 2019, 卷号: 66, 期号: 8, 页码: 3683-3685
Authors:  Xiao Kan ;   Zeji Chen;   Quan Yuan ;   Fengxiang Wang;   Jinling Yang;   Fuhua Yang
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A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing 期刊论文
Journal of Micromechanics & Microengineering, 2018, 卷号: 28, 期号: 11, 页码: 115003
Authors:  Xiaochen Liu;  Lihao Wang;  Yinfang Zhu;  Junyuan Zhao;  Jinying Zhang;  Jinling Yang;  Fuhua Yang
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A high accuracy cantilever array sensor for early liver cancer diagnosis 期刊论文
Biomed Microdevices, 2016, 卷号: 18, 期号: 6, 页码: 110
Authors:  Jingjing Wang;  Lihao Wang;  Yinfang Zhu;  Jinying Zhang;  Ju Liao;  Shuaipeng Wang;  Jinling Yang;  Fuhua Yang
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A High Throughput Cantilever Array Sensor for Multiple Liver Cancer Biomarkers Detection 期刊论文
IEEE SENSORS JOURNAL, 2016, 卷号: 16, 期号: 12, 页码: 4675-4682
Authors:  Jingjing Wang;  Yinfang Zhu;  Xing Wang;  Shuaipeng Wang;  Jinling Yang;  Fuhua Yang
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A low feed-through 3D vacuum packaging technique with silicon vias for RF MEMS resonators 期刊论文
Journal of Micromechanics and Microengineering, 2016, 卷号: 27, 期号: 1, 页码: 014003
Authors:  Jicong Zhao;  Quan Yuan;  Xiao Kan;  and Jinling Yang;  Fuhua Yang
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A novel MEMS electromagnetic actuator with large displacement 期刊论文
Sensors and Actuators A: Physical, 2015, 卷号: 221, 页码: 22–28
Authors:  Xingdong Lv;  Weiwei Wei;  Xu Mao;  Yu Chen;  Jinling Yang;  Fuhua Yang
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Frequency Stability of RF-MEMS Disk Resonators 期刊论文
IEEE Transactions on Electron Devices, 2015, 卷号: 62, 期号: 5, 页码: 1603-1608
Authors:  Quan Yuan;  Wei Luo;  Hui Zhao;  Bohua Peng;  Jinling Yang;  Fuhua Yang
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A novel MEMS actuator with large lateral stroke driven by Lorentz force 期刊论文
Journal of Micromechanics and Microengineering, 2015, 卷号: 25, 页码: 025009
Authors:  Xingdong Lv;  Weiwei Wei;  Xu Mao;  Jinling Yang;  Fuhua Yang
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