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Dependence of ultra-thin gate oxide reliability on surface cleaning approach 会议论文
1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, BEIJING, PEOPLES R CHINA, OCT 21-23, 1998
作者:  Gao WY;  Liu ZL;  He ZJ;  Gao WY Chinese Acad Sci Inst Semicond Beijing 100083 Peoples R China.
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