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Homoepitaxial growth of multiple 4H-SiC wafers assembled in a simple holder via conventional chemical vapor deposition 期刊论文
Journal of Crystal Growth, 2019, 卷号: 507, 页码: 283-287
Authors:  X.F. Liu ;   G.G. Yan ;   Z.W. Shen ;   Z.X. Wen ;   J. Chen ;   Y.W. He ;   W.S. Zhao ;   L. Wang ;   M. Guan ;   F. Zhang ;   G.S. Sun ;   Y.P. Zeng
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The influence of growth temperature on 4H-SiC epilayers grown on different off-angle (0001) Si-face substrates 期刊论文
Journal of Crystal Growth, 2019, 卷号: 507, 页码: 175-179
Authors:  G.G. Yan ;   X.F. Liu ;   Z.W. Shen ;   W.S. Zhao ;   L. Wang ;   Y.X. Cui ;   J.T. Li ;   F. Zhang ;   G.S. Sun ;   Y.P. Zeng
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Improvement of fast homoepitaxial growth and defect reduction techniques of thick 4H-SiC epilayers 期刊论文
Journal of Crystal Growth, 2019, 卷号: 55, 页码: 1-4
Authors:  G.G. Yan ;   X.F. Liu ;   Z.W. Shen ;   Z.X. Wen ;   J. Chen ;   W.S. Zhao ;   L. Wang ;   F. Zhang ;   X.H. Zhang ;   X.G. Li ;   G.S. Sun ;   Y.P. Zeng ;   Z.G. Wang
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Process optimization for homoepitaxial growth of thick 4H-SiC films via hydrogen chloride chemical vapor deposition 期刊论文
JOURNAL OF CRYSTAL GROWTH, 2018, 卷号: 504, 页码: 7-12
Authors:  X.F. Liu ;   G.G. Yan ;   B. Liu ;   Z.W. Shen ;   Z.X. Wen ;   J. Chen ;   W.S. Zhao ;   L. Wang ;   F. Zhang ;   G.S. Sun ;   Y.P. Zeng
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4H-SiC同质外延层中的扩展缺陷研究 期刊论文
半导体光电, 2011, 卷号: 32, 期号: 3, 页码: 359-362
Authors:  闫果果;  孙国胜;  吴海雷;  王雷;  赵万顺;  刘兴昉;  董林;  郑柳;  曾一平
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电学测试的汞探针装置 专利
专利类型: 发明, 申请日期: 2010-08-12, 公开日期: 2010-02-10, 2010-08-12
Inventors:  纪 刚;  孙国胜;  宁 瑾;  刘兴昉;  赵永梅;  王 雷;  赵万顺;  曾一平;  李晋闽
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一种高温碳化硅双室热壁式外延生长装置 专利
专利类型: 发明, 申请日期: 2010-08-12, 公开日期: 2009-12-02, 2010-08-12
Inventors:  孙国胜;  王 雷;  赵万顺;  曾一平;  叶志仙;  刘兴昉
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碳化硅射频微电子机械系统滤波器的制作方法 专利
专利类型: 发明, 申请日期: 2009-07-01, 公开日期: 3999
Inventors:  赵永梅;  宁 瑾;  孙国胜;  王 亮;  刘兴昉;  赵万顺;  王 雷;  李晋闽;  曾一平 
Adobe PDF(713Kb)  |  Favorite  |  View/Download:1138/272  |  Submit date:2010/03/19
一种用于微电子机械系统的碳化硅微通道的制作方法 专利
专利类型: 发明, 申请日期: 2009-07-01, 公开日期: 3999
Inventors:  刘兴昉;  孙国胜
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多晶立方相碳化硅微机电系统谐振器件及其制作方法 专利
专利类型: 发明, 申请日期: 2009-06-03, 公开日期: 3996
Inventors:  王 亮;  宁 瑾;  孙国胜;  王 雷;  赵万顺;  赵永梅;  刘兴昉 
Adobe PDF(519Kb)  |  Favorite  |  View/Download:1047/215  |  Submit date:2010/03/19