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Bulge testing and fracture properties of plasma-enhanced chemical vapor deposited silicon nitride thin films 期刊论文
THIN SOLID FILMS, 2009, 卷号: 517, 期号: 6, 页码: 1989-1994
Authors:  Zhou W;  Yang JL;  Li Y;  Ji A;  Yang FH;  Yu YD;  Yang JL Chinese Acad Sci Inst Semicond Qinghua Donglu A 35 Beijing 100083 Peoples R China. E-mail Address: jlyang@semi.ac.cn
Adobe PDF(646Kb)  |  Favorite  |  View/Download:1325/494  |  Submit date:2010/03/08
Bulge Test  Fracture Property  Silicon Nitride  Weibull Distribution Function